
Slit Coupling for Cleanroom & Vacuum (XSTS · XWSS · MSXP)
One-piece slit couplings for cleanroom, vacuum and heat-resistant use: zero backlash, low particle generation and excellent chemical and corrosion resistance.
Environment
Vacuum-vented shaft couplings and special screws that prevent trapped-gas pockets and keep outgassing low, so chambers pump down fast and stay clean.

Overview
Components used in vacuum must have low outgassing rates and must not trap pockets of gas. A standard screw seated in a blind or tapped hole traps air beneath it: a "virtual leak" that slowly releases gas, slows pump-down and contaminates the chamber. NBK vacuum screws have a through-bore that vents this trapped gas, while vacuum-rated slit, bellows and Oldham couplings use low-outgassing, corrosion-resistant materials.
Stainless steel is the preferred material for its low outgassing, wide temperature range and corrosion resistance; titanium and special alloys are available for ultra-high vacuum and non-magnetic requirements. All vacuum parts can be supplied ultrasonically cleaned and cleanroom-packaged. Full specifications and CAD files are on nbk1560.com. Tell us your chamber pressure and materials and we match the right part.
Vented through-bore screws release trapped gas so pump-down stays fast.
Stainless steel, titanium and special alloys keep chambers clean.
Optional ultrasonic cleaning and cleanroom packaging on request.

One-piece slit couplings for cleanroom, vacuum and heat-resistant use: zero backlash, low particle generation and excellent chemical and corrosion resistance.

Heat-resistant, chemical-proof Oldham couplings with PEEK or VESPEL spacers for cleanroom and vacuum use: high misalignment tolerance and electrical insulation.

Vented (drilled) socket-head cap screws that release trapped air and gases during pump-down to prevent virtual leaks in vacuum and cleanroom systems.

Grade 2 and Grade 5 titanium socket-head cap and machine screws: lightweight, non-magnetic and chemically resistant for medical, aerospace and semiconductor use.

Fasteners for service far beyond 200 °C: SUS316L, molybdenum, ceramic, Vespel, Hastelloy and Inconel screws for furnaces, plasma and high-temperature process equipment.
The through-bore vents air that would otherwise be trapped under the screw in a blind or tapped hole. That trapped air is a virtual leak that slows pump-down and contaminates the chamber, so venting it is essential for reliable vacuum performance.
Stainless steel slit couplings (MSTS, XSTS, XWSS) and cleanroom/vacuum Oldham couplings (MOP, MOHS) are vacuum compatible, using low-outgassing, corrosion-resistant materials and clean-room washing on request.
Our engineers help you select the right coupling or screw, and prepare a quotation.